![](data:image/png;base64,iVBORw0KGgoAAAANSUhEUgAABKcAAAaVCAIAAABhzzulAAAACXBIWXMAABYlAAAWJQFJUiTwAAAgAElEQVR42uzdy29cV4LY4XNLtFSEbKpEB3qgYZgSvNXCgD2RA/ciQALEiwbmP8jAo/YEvfBavbK8Gq+dYODx9DT6nxh4l00aaAN20gttG3rAaOiBmCyVrbAkU3WzOOTh4b233kWZRX4fDIMqVt0qVskAfz6voizLAAAAwDHV8hYAAACoPgAAAFQfAAAAqg8AAADVBwAAgOoDAABA9QEAAKg+AAAAVB8AAACqDwAAANUHAACA6gMAAED1AQAAoPoAAABUHwAAAKoPAAAA1QcAAIDqAwAAQPUBAACg+gAAAFB9AAAAqg8AAADVBwAAgOoDAABA9QEAAKD6AAAAUH0AAACoPgAAANUHAACA6gMAAED1AQAAoPoAAABQfQAAAKg+AAAA1QcAAIDqAwAAQPUBAACg+gAAAFB9AAAAqD4AAABUHwAAgOoDAABA9QEAAKD6AAAAUH0AAACoPgAAAFQfAAAAqg8AAED1AQAAoPoAAABQfQAAAPysVrwFL8Hmx0X9xvXPS+8MAABw2Iqy1B4vKfPG0oEAAIDqW4LeaxXhybMQ39e1M0OLrl6GK62w1Q9vfuETAQAAVN+R7L37vRBCWG+HEKaLt0oB3u+Ft//gcwEAAFTfEeu9qBJsseju98Jrp3eDcLMf1tthsx9CCG99WTbmX/dZuPrPPhoAAED1/dy9l4ruh+cHeq8yfLfZD299WY5Y75dPAY13a8xCAAAA1ffyki+GWd5mw7puRPXFob9K/m1/9en2V7e0HwAAoPqOSvKN3rczttzke3vm9xd+AADAzJzSvoDk2/y4qOdc4zEM65+XEx7P8NffFOkicSTwLx8V3nkAAGBaxvrmTb4w9yHs+cPz2Z7pCukOcZqojwAAAFB9Lyn5Gntv9YNbqx980hh1o+Mwv+fqB7fiur7K1FDhV9G5/n65sxNCePLt194NAACoW/EWzJ988diGN9f2kyytx/vheQghnD8TQnZie+M13/qyXP+8ISP/8lGRfyvf9+WQIiqEUO7sLFFElS92TkLchhAGz/q9P3/rv0QAAFTf4sUdNbd3Qghh/Ve3XmkdGJd7cy2EEFY/uPXWB59sf/Vp799u/fA8rP/q1noIb/3qk7FX/sVe/sXr/+KfyhDCD//9P8Y7rLfD5sfF6ge31j8v48v462+K7Z1DGfH77He/DyGEoghFOPfu9SffLEf4FSsr5WBw7t33nnzzp2P512/3cwmhOH3m3N/8h9/++u9v/vrv/VcJAMCkvzCb4TmJNHY3bFZnPkxXmeE57bOki8QZno3Pcki7esYBpaT79R+P/kfTuf7+4Fk/hFCsvHJsqq8y4lr5XJblowEA4Igw1jddjA3bqzPdPmwTl7wb0x9bRRiU+4+qzPBsnPAZb0y7eh7KGr+iCEfp/wWMnXTaaq/GpX3Hpvd2P4eVlXrvAQDAtJzcMKn1z8thiTU6+eK5Dvd7u8v/8mMeBmXDs+yd0n7rwEX6+xdPXyw2+fYDYy/5jkJypNcQEyjNdVyWhOu898tz77537t33pk0+AABYFGN9Y4zYgfOH5+HNL8qxybfSCpvb4fyZ5t1cGh8YB/Q2Py72Sy97MfmJDpOfD/HSemOB00QXXkGd6++Hoih3fvrtRzdu/vrGy/gLVJbFqVPxqU3LBABA9R3d5KtM44xGJ1/61s5gaO+F4TNC47q+1HX5U8eJnaMPhPi5yqp+tXjLDMEzyQub6sXv3rksi5VXPvvXP+TVdxgLGg3cAQBwRJjhOXUBLvDOs43U5Yc3zNx+nevvx3/G3O29X5579/pn//K7l5xAo+8fX/m5d67HPw762yGEsVu57Lfcz7FqcbEDffFz8V8lAACqbzHSViuVG4cN9G1/9en8T5p2AV3UmF5eelM0WFkWp1Y++9c/vMw3fGzyhbB7vEQIIW7geXQVRTxOsHP9/bW331l7+53FXLYsi1P2egEAYCJmeA41drvOxuQLtY1YRsdk2Fv7t9UPIYQ3vygbw3L/VfV3T/Br/O7MKTXJw4/CsrR8N5fi1ErlFcYCHHaO+eTvQH7PRfzURffrP3auv9860w7Dp7xKOAAADomxvkkLMP7zl4+KuJ3msOKavMTSNUMIO4Pw2unw2unmhx/Y1qU9+zOGEEJRHOob1f36j/WeKXd2yhcvFlmnB8+W6P352zi9s9VeLVZeWeyGmXPFWFHEIyWmu8jEn5HtYQAAmISxvjH2R+T6IYTwSqv5u4f37JWoi2N9KQWnnf9Z/vRTCKFYWUnBMGGQTBUY8c75oQv5H4ddaqp5pw2PLYpy56f4hFO9J4cxyJZds6yMSaY7VN6HOB4YP6P4jlXEkcw4YKj3AABQfYfltdO7+feSpcaLyXe/F147vXucw1QlNnPwTDLDc558OvDYoih3fmqMpQOKIpRl78/f7m/OeWql/pOOeFVjX/C8cVWWw36KxitXarmidaadlS0AAKi+hRZX2JtaudkPI05NWODOK6NeTz+Epqmes1fWS7zOIgepyjJMuPXLy32F88TkmMcOz0gAAFB9s5ReXd5ahzG9c9iJ7ZXXMGfyjbE3oJQHxuQDaMPcvPHhzRsfjg2hzvX3x7bN4Fk/TnScMKgGz/rFyivxtPT4A444vGHsrjA/T+8BAIDqOwyHvWxvxs+sFTa3Qwj7Mzzz7V7mjZMJ5hBO2icj42qe7GlMvhFB1TrT3l01t/fT/fYfPrp548NRcykX9FIX0HvpbdzbG2Y/XwEAQPUt1u7Uyp/7ZewMwtazcP7MbpcueFppWRYrrxyotaIYtgNnPubWsCYtXWRI/qUzDOYc5hoRVNVNaw7+dPM/9TyvbdJI3k++3b1qbOUCAIDqOxRFCK0idM6Mus/qB7cmPKxv2MNHfDc//P3cmXBm+vGez373+3jeXTkYhBCKVmtY+FX/ePAsgUp1xGuOyqeyDCH8p3//N43fnLa7yp2d0GqlFx9/lhE/cvx3ORjEh8SC/V//+//kR//VjZiMeuDF7F129AsYe9nyxU45GBSnVnZfZP2yZVmcWokPn/CaAACw2zJlWXoX6nZ3cDl4LHurCINyf3ht2KTKdP+VVtgZjMvuVtjcDmtnRs0mHTGaN/bFVONqb8joyTdfTxpdRXHzw/9689c35gm2ETuIDp71i5WVfPvNSVbHZT/OTjysb8SPXBm6DGUZFxkOe6JJBtN2T1l48SI9+5zvxsxvr6E/AADGRIe3YNIO7Id/tzrRPeOI30orbPVDCOHNL/bTMXZjraomWkCYB96EpdfQD2VZnJrosL6fa/bj6JdUeePiOrexlXtgb5iyDCF89rvf/+M//8uwBXJp6umEL/6QT/wDAADV91Kst8P/PbiHyvDq+2T1g09CCGupGD8uUgS+dvpASYbaye/j+zMb+ptkUV9jP4zdQWSK6hh3vN4sg1ETHNk36G+HEIqVV8beJ4SiHnhj90TJ34FpD7Ufe+X590QFAIAJtbwFE/bV/d4sRyZsflzkyRdCWP+8TGN08WpxMHCuIp1k0K8oyhc7YcJBvGwjlvHHgpdlKA+m3d5zhZnnH5bl7jheUZQvdtLV8kZqtVdHJF983taZdnFqZXcSZnap/bVwxUR74XSuvz/VBM74zyw/eFGUL14M2z5nMUUNAMAJY13fmORL0yk3+7uDcm9+sb9t5tjcyh87c93VX0kIuxecZKpnypXBs348g+7wzi6vP9c8hi3eyxYEvjJsUV/DpfZmhMaH5G9CXJ43+m1pHp2rnW044SDe0NmtB19kqE1VlXkAAEzLDM9JpVG+SSZVNpyrnoVZ/QpTbeUy7XjjmE44uNnJ7olwKzP+xTiUJhn+PyYmTL50neLUqTSMVn+p1VHQbJZp450nfEPm2eWlsiDTf4YAAKi+w+m92pl4M5ySN+epevUs3OzPfnJgvlVm+dNPoQhxEKlz/f04AfLJt1+HI7DYbIENOXmkhexwv1Ae2KVzAe/2zk4oigmPWbfYDwAA1ffz2/y4aBymmyoLJ9yKszLP860v5z2fvWEuYlE0jPINP6X951QUxcor5959b84kO+zarL7qlbmmaJreCQDADOzmMmlrTRJ7k7TcZj/0nk2afPWui7fkV1iksixWXgmhqNwYBoOj84lkI2DLtCR1zi1e/JcIAIDqW7zGHos7qYxepFe5/2a/eqmNf97dxnOzH/7yUTE2+eKd880/185M2o2zhN/e/MMUKnHC59FSlsWplQmnSi69sixf7BjoAwBgNmZ4jhdH9nbTa9p0bO+G4rCim7lF55zeWScqjhqfCAAAC2Gsb3ZzBliswbe+bB6p2/7q08qzjH4NJ87RXG0IAACqb0m7bp7w++F5+PPf7X53pRVWit07//B81JW3v7qVrjxsdd9JVv70UyhLo2EAADCWU9rHaDyQPd240gqb2/ur7BrOVxiXZ82rB7Pr7wzCsBcw+UBf5/r7g2f9EELrTDuEdLZ4Mfm6uPLFi+LUqfqh5KFy2kH+kJ2dyo6gBw6vS6fhZdc88CIPio+9eePDmzc+3DvNfO+VZCeb5we77/50Bw8kTN9qOp1vZ+9nPHCYe36GYf6oshyEweDJN19XDlJv+nqn/lYfeH9qZwPm19x9iuFvPgAAjGCsL0xYZanE4hcrrdB7Fja3Q8hG7aYdghuRfKsf3DpwY39/0G/33/1JnyX2Q+tMe7+mpt8KZffOuw+ccTlo8wF02TUPvMghj02H6e2/kvr/ucj2pBl2yPu5d643PyS7f3yuvF3zH6EoWsWplf3rHHyi/XcpfzFDq3rIIexlWZxaafiRAQBA9S1QCrC//qb46292u25nENbOhE47DMrwogzrn5fxbpsfF2lJXiXeWkV4thOe7TR8K4Sw/dWnP/zbp/H6qx/cWv3gk/gs6bEPnobus/DDv326vTNF8oUQbt74MIRQDgbl3gEMjQNE6caxw0dx7Gt8KK6M7ZOics3GF5m+GDx/Hn+WsS8yv8iwe+Yv7+aND0fcsxwMQqs14sdMD3zyzdf1N3/YlfMX0HB24t4Hl18q/bP7Xk32QQAAcMKZ4TmpxnG8yo4s+X1Gb9ZSuXKquPX2/sMr57Bv9ne/O/mV6yExQpq7WJ36GMLNGx9+9rvfjyjAJ99+Pez6aR7jzRsf/uMXX4ZsqmTlVVWet/568ofU7zzsh2285/4szb2XV7n46HesMnm18aWmh4++WjkYFAeTsv7+j/ik/IcJAMBYZotNav3zMk2tXM8mIVaS734vXP7bW6f/563dQvu4uN8Lb/+heSbn/d7u16+d3r1UyrzVlQNPmoJwhuSLhZAvTktjRJU/DjMs+eIVKg8vd3ZCsb9iMK+j/M6d9365v/Jt73XmL3LsD1V5ouoPu/ettbffyWeNVp43Pdfa2++EuKSwKM69+15Ik1qH/NQhhMGzfrHySuMM0s57vyxf7MRn2b/ycPkP3nnvl7urKGufVFz3eO6d65O8RQAAEJnhOX3+ZUfwxU5LK+5aRXhzLZw7c+BE9TfXQrpP/k+81Ho7vP2H8q0vyxhy6VGrK7sHuOeXmm2ULx8Ryr9+8u3XCxksime4H7jyN38afed5TPpE3/xpwp9u9N0q8zMrd37yzZ9G/ERjrxxC+O1HN8b/mAc/qfnfQwAAThQzPKezv6dLf7e+6jM/t3fCL/5p/1tpvG7CLTcrF8zHGGdIPgAA4IQzT2w6+wnXDn/5qKg0WKsIgzKkbV1CCPd7ITSdtpemia60wlY/vPnF0JWBQfIBAABzMMNzlvDb/aId/vJRkW+nefdJ+OF5WP/VJyne3lwLrabTHNLKwMf/L/w0CPf/W1FJvvCfb731ZRlnk0o+AABgZsb6Zg+/zY+LVGW7q/JCCCFsf/Xp/V54c233zoMy3O+F9fbud9Nxf1v98Nrp3bP+4nYv+d4tqysH9vaUfAAAwGys65tLfZlfrL7tr26FEPL2q5z2HnMujvjFeaHh4MK/O/9QPHkWXjut9wAAgLmY4TmXfLbn5sfFn/8unrH+SbwxJV/DA9v7kzwH5YFT1+N1njwLwRAfAAAwN2N9i5EvyftpEC7+jwMje/kgXn7P+u1x5mcI4cx/uXXpbz/xxgIAAKrviLZfmrcZRp7ZkGJvc3vvIyn2t/QEAABQfUdOWtc3rQkP9AMAAFB9R0X9DHelBwAAqD4AAAAWwx6eAAAAqg8AAADVBwAAgOoDAABA9QEAAKD6AAAAUH0AAACqDwAAANUHAACA6gMAAED1AQAAoPoAAABQfQAAAKg+AAAA1QcAAIDqAwAAQPUBAACg+gAAAFB9AAAAqD4AAABUHwAAgOoDAABA9QEAAKD6AAAAUH0AAACoPgAAAFQfAAAA0Yq3YCkUReFNAACAeZRlqfrwdxQAAI6nkzyOYoYnAACA6gMAAED1AQAAoPoAAABQfQAAAKg+AAAAVB8AAIDqAwAAQPUBAACg+gAAAFB9AAAAqD4AAABUHwAAAKoPAABA9QEAAKD6AAAAUH0AAACoPgAAAFQfAAAAqg8AAADVBwAAoPoAAABQfQAAAKg+AAAAVB8AAACqDwAAANUHAACA6gMAAFB9AAAAqD4AAABUHwAAAKoPAAAA1QcAAIDqAwAAUH0AAACoPgAAAFQfAAAAqg8AAADVBwAAgOoDAABA9QEAAKg+AAAAVB8AAACqDwAAANUHAACA6gMAAED1AQAAoPoAAABUHwAAAKoPAAAA1QcAAIDqAwAAQPUBAACg+gAAAFB9AAAAqg8AAADVBwAAgOoDAABA9QEAAKD6AAAAUH0AAACoPgAAANUHAACA6gMAAED1AQAAoPoAAABQfQAAAKg+AAAA1QcAAIDqAwAAQPUBAACg+gAAAFB9AAAAqD4AAABUHwAAgOoDAABA9QEAAKD6AAAAUH0AAACoPgAAAFQfAAAAqg8AAED1AQAAoPoAAABQfQAAAKg+AAAAVB8AAACqDwAAANUHAACg+gAAAFB9AAAAqD4AAABUHwAAAKoPAAAA1QcAAIDqAwAAUH0AAACoPgAAAFQfAAAAqg8AAADVBwAAgOoDAABQfQAAAKg+AAAAVB8AAACqDwAAANUHAACA6gMAAED1AQAAqD4AAABUHwAAAKoPAAAA1QcAAIDqAwAAQPUBAACg+gAAAFQfAAAAqg8AAADVBwAAgOoDAABA9QEAAKD6AAAAUH0AAACqDwAAANUHAACA6gMAAED1AQAAoPoAAABQfQAAAKg+AAAA1QcAAIDqAwAAQPUBAACg+gAAAFB9AAAAqD4AAADVBwAAgOoDAABA9QEAAKD6AAAAUH0AAACoPgAAAFQfAACA6gMAAED1AQAAoPoAAABQfQAAAKg+AAAAVB8AAACqDwAAQPUBAACg+gAAAFB9AAAAqD4AAABUHwAAAKoPAAAA1QcAAKD6AAAAUH0AAACoPgAAAFQfAAAAqg8AAADVBwAAoPoAAABQfQAAAKg+AAAAVB8AAACqDwAAANUHAACA6gMAAFB9AAAAqD4AAABUHwAAAKoPAAAA1QcAAIDqAwAAQPUBAACoPgAAAFQfAAAAqg8AAADVBwAAgOoDAABA9QEAAKD6AAAAVB8AAACqDwAAANUHAACA6gMAAED1AQAAoPoAAABQfQAAAKoPAAAA1QcAAIDqAwAAQPUBAACg+gAAAFB9AAAAqg8AAADVBwAAgOoDAABA9QEAAKD6AAAAUH0AAACoPgAAANUHAACA6gMAAED1AQAAoPoAAABQfQAAAKg+AAAAVB8AAIDqAwAAQPUBAACg+gAAAFB9AAAAqD4AAABUHwAAAKoPAABA9QEAAKD6AAAAUH0AAACoPgAAAFQfAAAAqg8AAADVBwAAoPoAAABQfQAAAKg+AAAAVB8AAACqDwAAANUHAACg+gAAAFB9AAAAqD4AAABUHwAAAKoPAAAA1QcAAIDqAwAAUH0AAACoPgAAAFQfAAAAqg8AAADVBwAAgOoDAABA9QEAAKg+AAAAVB8AAACqDwAAANUHAACA6gMAAED1AQAAoPoAAABUHwAAAKoPAAAA1QcAAIDqAwAAQPUBAACg+gAAAFB9AAAAqg8AAADVBwAAgOoDAABA9QEAAKD6AAAAUH0AAACqDwAAANUHAACA6gMAAED1AQAAoPoAAABQfQAAAKg+AAAA1QcAAIDqAwAAQPUBAACg+gAAAFB9AAAAqD4AAABUHwAAgOoDAABA9QEAAKD6AAAAUH0AAACoPgAAAFQfAAAAqg8AAED1AQAAoPoAAABQfQAAAKg+AAAAVB8AAACqDwAAQPUBAACg+gAAAFB9AAAAqD4AAABUHwAAAKoPAAAA1QcAAKD6AAAAUH0AAACoPgAAAFQfAAAAqg8AAADVBwAAgOoDAABQfQAAAKg+AAAAVB8AAACqDwAAANUHAACA6gMAAED1AQAAqD4AAABUHwAAAKoPAAAA1QcAAIDqAwAAQPUBAACg+gAAAFQfAAAAqg8AAADVBwAAgOoDAABA9QEAAKD6AAAAVB8AAACqDwAAANUHAACA6gMAAED1AQAAoPoAAABQfQAAAKoPAAAA1QcAAIDqAwAAQPUBAACg+gAAAFB9AAAAqD4AAADVBwAAgOoDAABA9QEAAKD6AAAAUH0AAACoPgAAAFQfAACA6gMAAED1AQAAoPoAAABQfQAAAKg+AAAAVB8AAACqDwAAQPUBAACg+gAAAFB9AAAAqD4AAABUHwAAAKoPAABA9QEAAKD6AAAAUH0AAACoPgAAAFQfAAAAqg8AAADVBwAAoPoAAABQfQAAAKg+AAAAVB8AAACqDwAAANUHAACA6gMAAFB9AAAAqD4AAABUHwAAAKoPAAAA1QcAAIDqAwAAQPUBAACoPgAAAFQfAAAAqg8AAADVBwAAgOoDAABA9QEAAKD6AAAAVB8AAACqDwAAANUHAACA6gMAAED1AQAAoPoAAABUHwAAAKoPAAAA1QcAAIDqAwAAQPUBAACg+gAAAFB9AAAAqg8AAADVBwAAgOoDAABA9QEAAKD6AAAAUH0AAACoPgAAANUHAACA6gMAAED1AQAAoPoAAABQfQAAAKg+AAAAVB8AAIDqAwAAQPUBAACg+gAAAFB9AAAAqD4AAABUHwAAgOoDAABA9QEAAKD6AAAAUH0AAACoPgAAAFQfAAAAqg8AAED1AQAAoPoAAABQfQAAAKg+AAAAVB8AAACqDwAAANUHAACg+gAAAFB9AAAAqD4AAABUHwAAAKoPAAAA1QcAAIDqAwAAUH0AAACoPgAAAFQfAAAAqg8AAADVBwAAgOoDAABA9QEAAKg+AAAAVB8AAACqDwAAANUHAACA6gMAAED1AQAAqD4AAABUHwAAAKoPAAAA1QcAAIDqAwAAQPUBAACg+gAAAFQfAAAAqg8AAADVBwAAgOoDAABA9QEAAKD6AAAAUH0AAACqDwAAANUHAACA6gMAAED1AQAAoPoAAABQfQAAAKg+AAAA1QcAAIDqAwAAQPUBAACg+gAAAFB9AAAAqD4AAABUHwAAgOoDAABA9QEAAKD6AAAAUH0AAACoPgAAAFQfAACA6gMAAED1AQAAoPoAAABQfQAAAKg+AAAAVB8AAACqDwAAQPUBAACg+gAAAFB9AAAAqD4AAABUHwAAAKoPAAAA1QcAAKD6AAAAUH0AAACoPgAAAFQfAAAAqg8AAADVBwAAgOoDAABQfQAAAKg+AAAAVB8AAACqDwAAANUHAACA6gMAAED1AQAAqD4AAABUHwAAAKoPAAAA1QcAAIDqAwAAQPUBAACoPgAAAFQfAAAAqg8AAADVBwAAgOoDAABA9QEAAKD6AAAAVB8AAACqDwAAANUHAACA6gMAAED1AQAAoPoAAABQfQAAAKoPAAAA1QcAAIDqAwAAQPUBAACg+gAAAFB9AAAAqD4AAADVBwAAgOoDAABA9QEAAKD6AAAAUH0AAACoPgAAANUHAACA6gMAAED1AQAAoPoAAABQfQAAAKg+AAAAVB8AAIDqAwAAQPUBAACg+gAAAFB9AAAAqD4AAABUHwAAAKoPAABA9QEAAKD6AAAAUH0AAACoPgAAAFQfAAAAqg8AAADVBwAAoPoAAABQfQAAAKg+AAAAVB8AAACqDwAAANUHAACA6gMAAFB9AAAAqD4AAABUHwAAAKoPAAAA1QcAAIDqAwAAUH0AAACoPgAAAFQfAAAAqg8AAADVBwAAgOoDAABA9QEAAKg+AAAAVB8AAACqDwAAANUHAACA6gMAAED1AQAAoPoAAABUHwAAAKoPAAAA1QcAAIDqAwAAQPUBAACg+gAAAFB9AAAAqg8AAADVBwAAgOoDAABA9QEAAKD6AAAAUH0AAACoPgAAANUHAACA6gMAAED1AQAAoPoAAABQfQAAAKg+AAAA1QcAAIDqAwAAQPUBAACg+gAAAFB9AAAAqD4AAABUHwAAgOoDAABA9QEAAKD6AAAAUH0AAACoPgAAAFQfAAAAqg8AAED1AQAAoPoAAABQfQAAHA3dXs+bAKoPAIBj67vvN2/fved9ANUHAMAxlHrvzoOH3g1QfQAAHDfXrmzEL572+94NUH0AABwT+Vq+i+c78YvH3a53BlQfAADHQVzLV8m8R1td4Qcnx4q3AADg2Hjc7T7a6p5tt19dbZ9utb77fjNl3qOt7tXLl7xFcAIVZVl6F5bgcyp8UgDAeFNt0ZlW+oHfqI83MzwBAJZet9cbNmPz4vnOtSsbZ9tt7xKc3OI1grQcn5OxPgBgiDS+d/F850KnUxnuizfGr+P8z/y7hvvwG/VJYKwPAGC5pZ05Q9PmnPnGLRc6nYvnO6PvD6g+AACOlthyYW/LllAbwauE34VOxxAfqD4AAJYs/PKQu/PgYWUtXwy/Ow8eVh5YmfAJqD4AAI6uNHXzab9/++69yjkNj7a68fbGhwCqDwCAoy5N9YzqI34p86Y64AFYdnaGXJLPyR6eAECTx93uhU4n/jvdmCPBnjgAACAASURBVEddnPkZd+/M9/MEv1GrPvwdBQCWIPnSwry86Lq93nffb8avz7bblame4Dfqk8YMTwCApU++cHCjzs7aWtrc5Wm/772CE071AQAspfr2m/GW/NB27xIQzPBcms/JDE8AIJPSLk7gvPPgYT6ml2Z1xtE/a/kgWNfnb4C/owDAEqnM7WzkHHbwG3VihicAwNLo9nq3796Lu3HWv2vXFqDRircAAGBZpJ0546TNNOKXjmfwFgGqDwBgKVUOY4jhd6HTedrv33nw8M6Dh6+utlMEVk5mB1QfAABH3fPBIH396up+1MVNXJ72+/luLqZ6AqoPAGDJ5FM647/jLZWpnvlZ7QCRnSGX5HOyhycAnFRxx860ck/ggd+oVZ+/owDAseq9+PXZdvtpv3/18qWn/b7wA79RT8XJDQAARz35wt76vTsPHl7odNKxDY+2uvbtBFQfAMByJ9/F853K6Xx5+AGoPgCA5ZOP8l3odPI/3r57T/gBqg8AYFlVZmxeu7Jx58HDyn3iLRc6nWtXNqzrA1QfAMAyJV9lqd7tu/fSQXxxG8+wt8YPQPUBACyZfC1f5VsXz3dSDZrbCag+AIDlbr/6sr1HWwe29ARQfQAAy+dsux2/uH333rD9WpzRB6g+AIBlkq/iu3r5Uv6tuF+L5APmtOItAAB4mY1XybY4dbOec+melfADmJaxPgCAl+fRVvf23XvdXi/+MR6+l263OSeg+gAAjoPvvt+MX1TG8fKj+ezdAixKUZald2EJPqfCJwUAx0Fcxffjdv9pv//G6+udtbXUe40DfaZ3gt+o52ddHwDAyxOX6j3auhdC+O77zVR9cR+XeEq7dwlYcPEaQVqOz8lYHwAcI/nIXj7iF3V7veeDQV6Jw9T3hgH8Rl1nrA8A4OWJo3nXrmykfVzyEb+o8sfRlxpbhgBGkJbkczLWBwDHovfi12fb7auXL40e8RsrdaND/MBv1KPZwxMA4KUmXwjhab9/++69/Ez2tKvn5C6e3y29R1vd/Kh3gGrxGkFajs/JWB8ALH/yxU5b4IhfHpNG/MBv1MMY6wMAWKQ08bIeZhc6nQudTjqMoT7ilzZxmVCeeUb8gGHs5gIAsDDxmPU7Dx6mlms8ieGN19fTlM47Dx7Odihft9erzAu1uQvQyFgfAMDCxLmacRAv3pJW34VsGLCztpaP+M32XI1LAR9tdSuDjQCqDwBgYd54fT19Hcf9LnQ6efjFG+t3nlYl7S6eH/osAPYIWZLPyW4uALA88iSLY3qVPTxnm9I5+ikO41nAb9THg7E+AIAFm2rEbzb51ZLKij4jfoDqAwCY1+279+o7Z1aW7cVxucrunbM93eNuN12tMfxyMz8LoPoAANhtsLC3gUq316t8tz7iF+ZYy9ft9W7fvRcncFYG8eKzP+5289dw8XxnnnWDwHFitdiSfE7W9QHAkdS4vm6qO8zwROlqI7brtKgP/EadGOsDAJhdHleNDTZ2HuZsyRdCeNztDku7hTwpoPoAAAhhyEzOBRp2zUdb3cfd7tXLly6e75xtt/Pkc1A7kDNvcEk+JzM8AeBoGzaTMz9NYYZZl/Vz+fKzGTQe+I16Esb6AAAWoD7iF3dYSZE2w6zL+sTOuBFoPrIXR/y8/8Co4jWCtByfk7E+AFgGw7ZXmXlErnLBNFpYHwM04gd+ox7GWB8AwMI0HpYwbZLFQxriMQyVkb10NkO6/Wy7ffF853TLL3WA6gMAWJA4o7JxWC8/n3225AshfPf9Zvr37bv3rl6+VPlWdPXypWtXNq5evnSh0+msrflcgGHMG1ySz8kMTwA4MsmXluqdbbfzJJtft9fLuy5/ljsPHj7t9+Mtb7y+LvPAb9STM9YHADBL8oUQnvb7I85Jn0E9+dKzDBvxA1B9AAALTr6L5zv5hpyLOqMvD8jKEXzxWfI1foutTUD1AQBIvv1RvgudTjxBIf5x4SN+8SleXT1QfZURvxmO/gNUHwAA45MvH+Wrn9E3j/zKw54xjvhJPkD1AQAcSvKFEPINOfMdO9NWKzO70NmfOJo/Y27+ZwFUHwAADcmXL6hLh+ZFjWf0zRx+165spPa7eL5z7crGj9v99McFPhdwcqx4CwAARidfCOHq5Utp8d5332/mByd01tYO6RyFC51OvmJw2nP/ACKnwC3J5+S8PgD4+ZIvnbSeH5o3w/HrSTyX72y7/epqu36RypzSyBl94DfqmZnhCQDQoHEtX35o3qOt7uNud7aLxwP3nvb78SKVLUDrHXjtyobkA2YvXiNIy/E5GesDgJcuH9nLh9rS7TMM98VRvvrtZ9vtPCmjWJWnWy3JB36jnoexPgCAamjFf+cZlqdaPc8m15h8YcjmnPFgQMkHqD4AgIV5tNW9ffdemt6Zn4yXz8OMh+bNub1K3KLTew6oPgCAl6Hb6+Vdl05oWOxR7Lmz7XbjMwKoPgCAxavPvYy3LPYo9nQWX2NDDpv/CaD6AABml++iGadupm81jvhNJQ4h3nnwMK4VTEeuJ2fb7Tnnec68lShwQjilHQA46SqH41XOUYhnss98FHs6pCGe01C/w6ur7cozTpt88bLOcAeGMdYHALAvn3V5tt2e51KVhYLJtSsb+ZXzFJxhRLGxJAFUHwDA/sTIfIJlWrl37crGq6tzVd+IRXqNV57nKHbtB4zg7O8l+Zyc0g4A8+n2enlTpYmRZ9vtV1fbFzqdfFwu7rnSeH7DhCqjfPkh7+mp851dZj6KPT9K3jkQ4DfqRtb1AQDHX2yweneFISvu8j/mbTabSoyli8+8Eu9xt5see/XypXmWBQIngRmeAMAJar9ur5cnX8XF853KWr6L5zuztdkkrTjb3pvx9ef7giaLPU4QODaM9QEAJ0i+1u7alY3KKNmjre78hyjEi8RWPIzldpVRyvxb8x8nCBxLxvoAgOMsjoZVts3Mw69y+8zDZXHHzphk8SLpaL40xli5/ulWa9qfJT78bLudxhIrYensPkD1AQAnK/kebXVjCNW3zYy3X718Kb9x5uGyfBTxab9/++69/FLffb8Zp2XmO69MtX1L/Fniw5/2+xc6ncZJpDbzBFQfAHCCxASK4Zd27Kzf7dqVjXm2bBl2Lt8I057LV1+LePvuvbPt9rUrG/VLGe4DKpwHsCSfk5MbAGB69RirrOVbyFEHlWepLxe8dmUjz7Zpn3TE9jP5pSonT8y8QSj4jVr14e8oACyN/Cy7PJPy2/OT9OZPvphb3V6vckT71cuXGocZp3qKi+c7p1ut54PBj9v9xteffi7VB36jzpnhCQAcW5Os5avk2bQaB+46a2uV2+ffXTOGXGdt7UKnM+z1139eANUHABxbcWJk5Qi+tLnLsLmRk188nZiXN1jatzNMv3hvtPzKFen128oFaGTe4JJ8TmZ4AsD0yRe/ri+0u3i+E78727q+ykK7OAq38OWCjVGarlxfOpi/sMW+APAb9bIz1gcAHEN5lT3uVs9eT9+dYZQv1IbU4h/zXUDn3EUzPjwOJ9avfPvuvfr14y0XOp1rVzYkH1AtXiNIy/E5GesDgGlU9nGJ8zzrJ7BPu+tJfZuW5OrlS0/7/RSEM++nUt+xs3LlyuufeWtQ8Bv1yWGsDwA4PtIgWOXs9Xi+eaWLxoZZGnNLt1SSLx+Fu/PgYX5yelpAOGfy1a/c+PrnOW8QOP7FawRpOT4nY30AMHEypRyqj/jF29N8yNEXTPM/G1fTNY4fxnG5+PXpVmuqMyHy5IuHNOSRmV85VuXVy5fSszuqAfxGPcKKjx8AOB5SMsUv4gkHeael22cIpMfdbuVRlR1coqf9/vwTO1PCddbW0lPcefAwxWes1jw4JR8wghmeAMAxce3KRjqkIT+hYebj0S+e78QBvdt378UL5hNHU4+dbbdnWFP3uNutrzOsJ1zj689ngc727IDqAwBYGvnqu7zKUvjNfHZ5HBVM8yobFwfGJ512L9A4sve03298YGVBYP31x4064z+VFYwAdWZ4AgDLnXyPtvbnRv643b92ZSPNlsz/HWbd5fJsu52HX/0O+ZDd6dZE/0s9v9udBw+vXr50odOpnDaRliA6ex2Ykz1CluRzspsLAAxJvvrtefglM+x3Ei9SP+R9mGmrsnL8+rCj5Gd+/YDfqFWfv6MAcBySLx5aUGm8SvjNcy5fPtZXabC4R+jZdvvV1fa0O3bWnyXuyVl/LskHfqNWff6OAsDJTb5wcIStftbCbOqDe5WRt4U8S/25GscVJR/4jXpO1vUBAEddt9d7Phj8uN2/evlSt9ebZEitftDC5M9VOYo9jfXVk2y2Z3nc7f643U+DhHlPpuMZ8g1dJB+g+gCA4ywPrfh1pfry9GockZtKJfkaBxLnkY9SPu33K/M5466e165sKD1A9QEAx1992C2JUZRv0Rlv+XG7P9X1nw8GI9bjvfH6el5rqQPT1xPu2NmYfJVAzVcPxl09/QUAVB8AcMzlyVefXZkfdVA5oWES+dW++36zcYVeYw3GsbjZfqL67jLplldX2+ncv8YNXQBmZo+QJfmc7OYCwAmTV9kbr6+nAIuzIvN1cfXYG7v9SeNWmfFZ8gHG/DrD9o+ZXOMV5r8s4DfqsYz1AQBH2oiVdU/7/TgTMg+/se00bHne88EghNBZW8vHGNPI3vxHpTcewl4Z8QNQfQDAifO4241L7+48eNiYcFcvX5p8lCzfGzMfQsxLstJp+cBgPFVvqtcfVw9e6HQqRwim8JtqLSKA6gMAjpuYSZU1fiEbsotTPWe4cn0v0MYxt7wDp02+fFzx0Vb32pWNyhJEo3zAS9DyFgAAR9C1KxuNLZfvqzmnlHOPu93bd+9VAuzi+U7eeGfb7WnX3eWDk/Hilcml+TMu8OcCqDDWBwAcUWlPy9SBi71+rLJhR/w92upePN+Z+UlHHO5XmeoZ7OMCqD4A4MQalkP58ryp5Oc9pLrL/zj/Oe+Vl1e/YNwhJj/FwQcNqD4A4KR73O3G0xreeH39+WBQP/huxAMrd7h2ZWPEyQ1h0dt1Xuh0LnQ6lWe88+Ch8T3gpbGuDwBYguR7tNWN1fTd95tTJd+jrW59YLC+Kcu1KxuNZ7Iv5MXXn9E57MDLZKwPADjqTrca/j/12OQLe2Nuj7a69XvGxXUhhLPtdr5tTL4FS+Pzjg68eMjE2Xa73nX15XwAL8fJPZ9+yT6nwicFALtbpEw+NzJtqRKLq7ES0zXn3GElf/i1KxuHug8N4Ddq1efvKABwoPqi+vDgsJ02Gw9wr2deulqlGONh7vlavkkuCPiN+pBY1wf8//bupqdxLG3AsKFpZBQqCiBBsUCCkmbJpv//b6gNy5IIEgsoJIgVQERMNczCNel0PuyT2E7s5LoW/VZTkIQ4mtd3P/Y5AJti8h6/qVO4kHv80v390kebvG7zdTC46t6M3ss3uss8wLKL1wSpGcfJrA8A5jfZY7Nmbmm/5d4oOPmwoxsznBx0dre3h4E3OfFzqSc4o1Z9+IwCQLXVV1Z3TV4aOnr5qJv6wBl1rbjCEwBYQ0m/H0VRK47H9kAfXaKziMuL84zd1c+ODkt/RgDVBwDwj9vHp6vuzfXd/XGnc3LQGQ7c0jvuSnmK9JGn/lWn3R59RocDWC3XDTbkOLnCEwDCTN0T7+Sg04rj4dgtveNu4ae4vrvf34t/9pJvp19fB4NZu8Yn/f77x0e6g5/jAs6oVR8+owBQVfKNJlnxO+7GRoVjG/2F7B0POKNeMld4AgDrYyz5Tg7+uQgz3WhhdMQ3totDiMmb9K66N6OXek5uDgGwcjveAgBgLY2O8tIa/NlLRu/xm9esOeFwu/bhs0TBm0AALIFZHwCwPlpxPPnF0gNsbBGXn73kqnszul7o7rZTLKBGzPoAgPWxvxevas3M67v7y4tzIz6ghvyHKABgfYwO2a66N0m//5Ak6d59RYzdqvfyZjMGoEmsDNmQ42QNTwAIlrEj37w39V11b04OOukNgVOXAC2+KCjgjLpqZn0AwLqZVV/zVlk64htdo2UsCEdngLN2bAdYffGaIDXjOJn1AcA80h3SX94Gw9v8zo4O59otfdbWf+nob/KL7ugDZ9S1ZTUXAGANpYF3PE+IDTdgGEu+scwb3aRB8gHNKF4TpGYcJ7M+AKjSMPPSq0CH/3py0GnF8djm7N9Ov07dIgJwRl1P7usDADbdVfdm6sWcURQddzpjyRdF0eRXAFQfAEBNjSbc5IoswyU6W3FsiU5A9QEANMxV92a43Mvo7XmT9+l9O/2asSEEgOoDAKidsQs1x0rv8uJ89Oa90W8+Ozr07gENYo2Qhhwnq7kAQKkmB3dTl+Kc/DbXeYIzatWHzygAm2t084Mikn7/9vGpFcf7e/HPXpL+YXd7u9NuJ/3+XNvuTXV9dz+8sLMVx1Mv8pz6zfNu+gc4o64D+/UBAKUlX7oSZpHwS7vx9vEpiqLXwe891od/SL9evLuGFZcO7oYDvamv/9vpVwcXaHbxmiA14ziZ9QHQkOSLCuxaPvog2dLp38J5mfT77x8f6fCwxNcPOKNWffiMArD+ybdwOIUnX5FnqTpcAWfUNWQNTwCg5OSLouhnL3lIkoIPkmveZ8l23OkM9+sr95EBVB8AsFbJN284LZZ8wg9A9QEAlcuutZBwKpJ8VYff7rYzJWAduFusIcfJfX0A1FJIs2XfIze5Id5i3IkHOKOexX/BAgAWNzoZmyVjFpf0+2W9EhdkAqg+AKB24Zfuvyf8AFQfAFD38AtJsgUe+fLi/PLiPLcqCz4LwHpzt1hDjpP7+gCoveu7+9fBIPt7xu6+m3VTXyuOv51+Hfti0u8Hzgbd4wc4ox5l1gcAlGOy0yYFXoQ59aE67XY6+ivrWQA2pXhNkJpxnMz6AGiIwInf7vZ2xuAuN+0WmCsCzqg39oxaS/iMAkDJCm7GEDLNC3wW4Qc4o45c4QkAlO7y4rwVx3V4Fpd6Aqg+AKASIff4TRW+XGdU6p2EAKoPAGA+Jn4Aqg8AWHMLT/xKfxbhB6g+AIBKzDvxW3gzdxM/ANUHAKzGXBO/ue7rm/dZhB+g+gAAKhE+8Xt5G1T6LMIPUH0AAJUInPjl7r1e/FmEH6D6AAAWl/T7w3+Oubw4D7mAs2CShTzL7rZTIGCD7HgLAIAS3T4+3T4+RVHUabcn//a404nylmxJ/zb9zsVkP8vlxbnDBGyUrc/PT+9CA47TliMFQK09JMnL22Ds+syzo8Op7feQJLlrdZ4cdIqE36xnmfWSAGfUa8ysDwAoIfmmVtzt41OtJn6mfMBmclE7AFBJ8qWuujdT7/E77nRy774rvuzK6LOcHR06WMBmct1gQ46TKzwBaGDyDc0ashX8cQBn1CHM+gCAxYU0WxRFV92bqV8PvIDTRgsAhYrXBKkZx8msD4CaSfr9dK3OQK04nrWZ3vXdfe42fcUXdwGcUZv1AQDMYa7kizK3X7e1OkC1xWuC1IzjZNYHQG0E3owXRVG6kkrgjM7ED3BGrfp8Rh0pAGph1k16YxZYgiXkkYUf4Ixa9fmMAkCFcm/ny7h/L4SJH+CMunTu6wMA5pB7O1+R5Ivc4weg+gCAOitlY73Li/NWHAs/ANUHACxb4B19xZn4Aag+AGDZchPr7OiwxKcz8QNQfQBAvXTa7XIf0MQPQPUBAMsTuEdfuS4vztNN/zLsbjufAciy4y0AAOos3aRhVnOWsn4MwHrz38YAgCDZd9mVVV9Jvz81/KZO/Mq9kxBA9QEAG21/L6v6Slne86p7M2s/wMnwu7w4L/1OQgDVBwBQleGiLFfdm9yJnykfQDj39QEAtXP7+DR1jnfc6aS3+QEQzqwPAChB6auqzJr4AaD6AIBKZA/Zit/XN7lK56x7/ABQfQDAClSxW3opi8QAqD4AgCC5G6bXqhgBUH0AwHyyL/KctZF6SPIt/LMAqD4AoEzZe7UvsARLdvKVvkgMgOoDAMiSvVd7NOcSLKZ8AEtgvz4A2ERJv99pt6/v7vf34p+9pBXH+3vx7vb21F3yRu1u5/8n46vuzdnR4fvHR/YVobnJZyt2gFJsfX5+ehcacJy2HCmADXLVvan6ysaMtTFPDjrHnc5DkmQ0W+DSmrMe6qp7c3LQyU4+13YCzqhVn88oAOvp+u7+dTBoxfG306+lP/hDkry8DV4Hg8Bmy5j+pa8z5EHSukvHielcMeQHVR/gjFr1+YwCsIbGZmjlls/CN9FNfRmV3pKXDgl9HgBn1KWwmgsA1MX13f1kBM67JGbpyTf1hUVhN/hJPoBaFK8JUjOOk1kfwLrLuFOu+MSvlLnc1JcReIOf5AOcUa+QWR8ArN7UYVpZZVXWpZhTX2S5y2xKPoBKitcEqRnHyawPYH3lRl2RWV/pd9/NejHFh36SD3BGrfp8Rh0pgDWUuxLm2dFh7h56S0u+KIoyFhcNXNWz3N8RwBm16vMZBaC+Kp3yRcHzt+GzhFdiiRM/OzQAzqhVH6oPYD1lT8aK79eX9Pu3j08Z3zD1isqHJImiKKT9MgZ0IQ9S0YaEAM6oJ+04/ACwfLkzseJFtEDyRVGUfjGk+t4/Pmb9VfogbtIDUH0AsKGyV+xczhAsI8myX152NAKg+gBg0y1hyhcVWFEz5AfdiQeg+gCA6eow5ctehDP3x8vdoA8A1QcA62M5U75c+3vxYi8vmjble0gSl3oCqD4AoPJNGgpKV93MdnLQmfpLqT6Amtv2FgBA1XKvnCz9ssnJQstOvtxFOzOWb7nq3iT9vqMMUFtmfQBQrZVM+Y47ncD91kMu7MzY2S91+/g0a+8+AFbOrA8AKpQ75ZtrKLf8lxcFb9Jg4geg+gBg41x1b14Hg+zvCZzIrerlzbUvX/a+8ACoPgBYKyFjtGF9LXNK9vI2iMqY8qWPM/m7OPQAdeO+PgAo37zxs8z74l4Hg4Xv5Rt7HAcaoBHM+gCgZOFTvrFQLHfi14rjhX82N/lm7fSw2tsUAZjKrA8AylTkEsdyJ377e/Fi47jc5Mv4He3dB1BDZn0AUJrFpnxjQVXWxG93e5H/L5+bfBm/Y5HpIgCqDwDqLmRJzBBlrYTZabfn3QkwZMqX8Tvu76k+ANUHAGuq+JRvLK6Wv/ddkSlfarHpIgCqDwDqrqwp36iyJn7hy6sUmfJFUXR5cb60ZUgBmMvW5+end6EBx2nLkQKoqeu7++r2MJhrk/RZHpIkcC/4s6PD94+P0WdM+v3bx6dWnLMwTCmvE8AZdUWs4QkAi8tdsfPkoBNYXFOlP1swqNIfD3kZwwHjz16Shlz6FVvzATS7eE2QmnGczPoA6id7yteK42+nX6N5Rm0Z6Vh8klZkS4klvDwAZ9TVMesDgEoiKk2+aJ5R2yylTPwkH8DmFq8JUjOOk1kfQG2kt7plfMNwyjeqDhO/hyQp2J+SD3BGrfrwGQVYf7lTvoxd8gpeZrnkxV0kH+CMej3YuQEAlpR80Tz7KExVSq2VlWqSD6AxxWuC1IzjZNYHUAO5mzScHR3m7llXfNQW8izFf5fsdpV8gDPqBrGaCwCEyt2mPORBii/ucvv4VLz6vp1+XeBy08DfEYB6Fa8JUjOOk1kfQA1krOMy7/ytJhO/6P9LvLy8DbJ3odjfi3e3t0t5RgBn1KoPn1GAWpsckS02ASsefqVP3iZfkos5AWfUqg+fUYCNMzbxKzJzq8/ED8AZ9RqzhicA5ITZ8J+pTrs9HLJdXpwXia7jTqfgqp7ZOwcCQGTW15jjZNYHsHTXd/f7e/FwFlfdtY4mfgDOqFUfqg9g2aaub1nn8LO6JoAzatXnMwpAqIy97Ez8AJxRN479+gBgjvRK/7aK8KvJPn4ArGHxmiA14ziZ9QFULGMvvknVXU5ZfOJnrwUAZ9RjrOEJAFE0z2KYBVfdzFZ8Vc+fvWR0xVEAcIUnAJsufLyW9ljVk7Til3pWdxkqAKoPANY2+Za5SKbwA0D1AcCSkq8Vx/t78e72su+JEH4AlMUaIQ05TlZzAVhF8kU12Adv6s6B4SzuAuCM2mouAEi+6VpxXIetz8+ODov8uMVdAFB9AGyikCnft9OvdXipnXa7YHwKPwDVBwCMq8OUb1Tx7RwcUwDVBwCb4vruPvsbCl5UWYXi+/hddW+Sft/RB9hA1vAEYLPkLo5StynfaPhFxaZ2t49PnXbbZwBg05j1AcA/ajjlGwu/4hM/Rxlg05j1AbBBshc1qe2Ubyz8ogITv0b8jgCUy6wPgA2yHouaLDzxq/kkE4CKmPUBQBQVXiRz+eE3b8Sa8gFsLLM+ADbFmt3SNtfEz5QPYJOZ9QFAg8MvCpj4mfIBbDizPgCoXNLvZy8kUyT8sid+pnwAmPUBsBFyo+tnL0lHZyU+43Gn85Akw1ncz15yctAZfrGsEVzGxM+UD4AoirY+Pz+9Cw04TluOFEDRBgtZ++Ts6DB8H/Ok33//+Njd3r59fDo7Ohz+uRXH+3tx7tO14vjb6dek3y9l5/TJX3Cu3wXAGbXqw2cUYCOqL8qbj111b9J5XYlrw5Q1kRv9HU35AJxRqz6fUQDVN1M6rHt5G7wOBmN/fh0Mqnh5Zc3l0gtZd7e3TfkAnFGrPp9RgI1T850bTOcAnFFXxBqeAFCXKE36fe8DAKoPAKaoaF+EJbt9fHIoASid6wYbcpxc4QkwQ9Lvp7GULrKSXYbht/atkLU3AZxRl8usD4BmG87HfvaS7Ilf7obmNfH+8eGwAqD6ACCKJhZoacQoDwBUHwAEub67n9qBGRO/3e0G/D++3KElAMzF3WINOU7u6wOYqLuMv82+x6/mWzikbOQA4Iy6LGZ9ADTP1CnfqOxx2dnRofcQANUHAPX1Ohjkfk9G+HXabZM0ADaH6wYbcpxc4QkwYrhbQ66MSz3DH2Qxk+uFzrXYTO5GFAA4o1Z9PqMAay7w9rzcfCrrNr+Q+WH4c6k+AGfUDyTBAgAAGBBJREFUqs9nFGDTlTLxSw2vBX15G4RcPjo6x1ugzULaT/UBOKMuy47DD0BDddrtTrsdUlDppZUZETX8q+PO9DbTYAA0uHhNkJpxnMz6AGYoceJXq9dsvRkAZ9RlsYYnAM0WviBnfXY/77TbDhwAqg8A5hC4BV99wg8AVB8AzKGJE78MLu8EQPUBwBRNmfgl/X7G305u9AcAqg8Aoqg5E7/3jw8HCwDVBwALurw4b8VxncPv5W3mloC2iABA9QFAvm+nX0O+bSXhd9W9ydgIXvIBoPoAIEg9J37Xd/cZfxvyggFgXvb+bshxsks7wEKuujfhlbjyF2PpTgBn1FUw6wNgnYV3VNUTP8kHgOoDgErUYTuH7As7AaBSrhtsyHFyhSdAMYGXelaxhGbIU1u6E8AZdXXM+gBYmezNysu1/Ilf0u9fdW9CpnySDwDVB8Aauure3D4+Le3plrmBe/rj6W+XsUmD5ANgOVw32JDj5ApPYL1c390Pc+js6LDTbi/neZN+PzA1F4uxpN9///j42QuNRskH4Ixa9eEzCqyhyfvclrx8ZRX3+D0kSXjsST4AZ9SqD59RYG2NTvlGNXTi95AkL2+D3Ms4JR+AM2rVh88osBGyh2xNnPiF7wK/ql8TAGfUVnMBYElyV7O86t40blXPy4vzVhyX/qQAUGbxmiA14ziZ9QENFz4TW+OJnykfgDNq1YfPKLCGwm+iG6rhPX65t+HNul8xcgsfgDNq1YfPKLDeFrjzLarlxC/3Ja18bVIAnFGrPp9RgKVaYMo3askjslLCL534teJ4fy/e3d5e2sQSAGfUGXYcfgAq8v7xUeTH0+3vmnVt5LfTr447AHVjDU8AqnLc6ZwcFGq27PUzyxWyumbuMqQAoPoAEH41Db9Ou517AecCu7EDgOoDQPjVJfwi++kBoPoAYLHwK7ia5TInfo4XAKoPABZRfOJXh99isY0oAED1AbAOssdxxS/1vOreJP1+1b+FTfYAUH0AMD35cq/DLB5+RTYABADVBwCLuL67T5MvCrgBrxETv4KvEABqxS7tABSS3uc2uqVB7u7q6V8VuU/v9vHJsisAEMisD4BFpNO2WbuWN33i9/I2c18+Y0AAGsesD4BF3D4+Zd9i1+iJX8Zu7Bm/EQDUk1kfAPN5SJLA3Qtyi64pq3oCgOoDYIOSL3w6F1J0VvUEgKptfX5+ehcacJy2HCmgScmXhlz4xZBzxeRUZ0eHpVztmfT7GRl5ctBxhSeAM+rGcV8fACWH2QK7nNfnHr/3jw/HGoB1K14TpGYcJ7M+oPbJ14rjb6dflxOWsxSf+F3f3c9aysWgD8AZdUO5rw+AcmKsYPJFNbjH76p7Y/VOAFQfAJJvXCuOF7iqs6Lwu+reZG8VOMusvQeHv6MPAwAN5b4+ALIsZ8o3Fn5RsXv8crcKnNqKy/wdAUD1AVALuVvhFb+Xb7Xh95Aku9vb2deFVvQ7AoDqA2D1cm+Tqy6Hjjud404ncDv4jPD72UumXn161b05OeiEhOX+nms7AWg2K0M25DhZwxNYuuziWs4ELHv3vECtOH4dDM6ODt8/Pl7eBq+DQfqVwB8vaydAAJxRqz58RoEmVV9Zy7cUfyWVWuavCYAz6opYwxNglQavvaj3ffDaq9sLy17QcsktdHZ0uJI3YVXPCwCqD2B9xO/dKIriPwZ1e2HhF0AuQafdXv7M7fLi3IWdAKg+AIrpfW/iq17VRY8F9/Gr7XMBgOoDWFPPP2r70lZ4H12G4hu4hyffXHv9AYDqA2CaX8/egxqGn+QDQPUBUIbBXXNfexWTwIckSXeET/r94Z8fkmRq+F1enFexzsrJQUfyAbCW7NIOsIrke7vbwN/7IUmOO530n8Ov/Owlw93SR7fmG/556jbrnXa7026X2J92aABgjdkFriHHyX59sE4mF3HZO43i0/q8wJCaCty7/CFJdre3O+12GnjpF08OOulu6YGvZ7jN+tgzlrWH+xK2mwfAGfUKmfUBsIjbx6eM6ssY4kVRNMy/QGkfTj5jwYmf6zkB2JTiNUFqxnEy64O1MHjtpRv0jVt01jd47cWtg/SfJb7O8I5qxfH+XpwO7kb/XN17mD7LZK1d392HP2+6JIzkA3BGvSHM+gCWZ3ryLViQd1F8Gr93o/duHEVR6yD9ypJ/o9fBP403+uclPONYs6VXaY5eRzqV+/cAUH0ANEG6HszokjDDewXrdH9gdX72kqmTuuOOizYBYJydGwCWZXIRl6G5lvTMWAL07S7rWYIZiAGA6gOgvOSbS8iuD88/ot73wWtvvd/Rq+5Nuq0fAKD6ANZF4EZ/v56jwvcQpuud1FzxbRsAQPUBUFKtlfI98yow8XN3HACoPgBKFTLEe5u7DMtcNbSWFt6sDwBUHwCLev7xr8Fd4GWZuRa+M3DRid/lxXkrjh1PAFB9APy7zX49/yvz3u5W/qLiPxbcRi/dBK/mHpLE5w4AVB/AUkzcmzffkC3j1r7nH4Ve2H9fFv7RJU/8WnF8ctAxYwSAEtmlHaACB3+l/7e02+p+PRf98d734auaVzrxe0iSn72Sp2onB50Zm63//oPb9gBA9QHUScGLOd/uovi0wpc3KPT4x51OWdUXvgv8yUGn9NQEANUHQHmVNa/e98HuRdw6+OcxXnv1WYczrbXJ++he3gavg8HUZhvrxhWmJgCoPgCKmVxjc6HRX/zejUaqr8zkK2mWOBlvx/b2A4Aas5oLQBkKruMyGZDp9g8L79YQnqa1F345KAAwlVkfQCUW3izht1/PRVdw2RgLXDgKABvFrA+gDDXYlC/U4K5Zb63t+ABA9QGwzrJXc3H9JwCoPoDqTd4sN7ir7/TvrUmzvqTf9/kCANUHoKzW1vvHR8bfju0MAQCoPoAKDARehV7eshbFsY4LAKg+AKZpyP4NV92bqZu/AwBzsXMDALWT9Pu3j08Z39CK42+nX71RABDCrA+gGLfwVSA7+aIoknwAEM6sD4AayZ3yRXZrAIA5mfUBFNCQG+QaJDf5AIB5mfUBsHoPSbK7vR2SfGdHh94uAFB9ADQs+X72kpDvdG0nACzAFZ4ArEDS70dRdH13H558pnwAsBizPgBW4PbxKb2eM3BHPlM+AFB9AEs3sGfDIsKHe0MnBx3vGwCoPgDqHnsvb4PAyd5Y8h13VB8AqD4A6m3e+V7kqk4AKInVXADW1N5ptHdan5dzeXHeiuPAb27FseQDANUHQJ64XuH37fRr6d8JAORyhSfAmvrvSxRHUXwaRVH0VpeFZy4vzq/v7mfd3ecWPgBQfQAE+/X8+w+T4Xfw1wpf17fTr1fdm8kadMQAQPUBMKfB3e/kq5nLi/OH5PfiLoZ7AKD6AFjU2/+rLz6tz0WeYg8AlsxqLgCbIeCqzsFrz9bzALB+zPoANk/v+5QI7H3/Z1+FWl4XCgCoPgD+b9qGDYPdi/i9O/1vjfgAQPUBMK5+N8v967VNfq11ELUO8n/27c6sDwDWifv6ABqo3L3XB3fj+dr77j0GANUHwOqSr8RZXO97fSeWAIDqA1h9gK0q+Xa+zPyejL8a8/xj5l+50w8AVB8AK7j/bfiMf+7P/J4v/wl6qN736NdzjX41AKAaVnMBKPi/o1+y2qn058oWsCnfb0Z5ALAxzPoAigkcrC3huUq83DS8HgEA1QdAHWWs4LLn2k4AWCuu8AQoZmmXSpYUY4PX3u+92mdxRx8ArBezPoBiltZIJT1RTvIBAGvHrA+gEf9rHbAZQ14W5k/5dr6M3zr4/CP6c9/0DwAazawPoLAlrH2SsU9DsPwp31jypVs7vN1Z8BMAVB/Axqt4BZTB33GR8hy89qLe9/mecnQD9zfVBwCqD4DqHPwVtw7GvzhWYplRF3Qv31g3Lm0TQgBA9QE0QHxa1bgv8GGLPftg9yLnAXvfB689xxkAmshqLgDlhV+0uoshZy24MrgLeUlTZomT3/PejQK+DQBQfQDCL9je6fScG1teZdoKn/krdtY5YgGA8rjCE6Ds8CvrUs+Dv2ZO8MZibGztzfSFFN+Xb/LZ510SBgBQfQDCb6opN9qNBeHUP6c/O/+KnTPv2ZucItrFAQCaxhWeANWEX1Tg8siDv+IiTz7/lC/+YzD9L/7ct5gnAKg+AEoKv50vU6/VnGqwexH/MRj8Hf+rD8PWbpnivy/RtNAcf/zhbxSfOsIA0BRbn5+f3oUGHKctRwqaLPd6y1mrtsxl4eQbmrrV+9QXn7kpPAA4o64Vsz6AyqVzud//Ep+O3ho3+DuOi2+H8Pwj+nO/hPU2n3+EDhsHd8Z9ANCY4jVBasZxMusDZil9Xc2xOd6sxy9lPgkAzqirZw1PgCZ7/lHpY85c2xMAaFDxmiA14ziZ9QGTwqd8w/Fd+I+ko7zs73d3HwDOqFUfPqNAVb23dxp6I1/gFZuLEX4AOKOuPau5ADRNegVmbvLtfIn+3J+y9ULaac8/bMQHABvCfX0ATRNYa1/+E8WnMxcIDd4YEABQfQDUzM6XoAsvD/6Kdr54twBg7blbrCHHyX19wJiyNk8vcpufm/oAcEbdBGZ9AI002L345192vkR7p//6yvDbcrdeUG4AsO6s5gLQSHHrIPr3PXvx5Df1vsdRFM26ta+gPVu0A0AzuG6wIcfJFZ7AvEZX6Ryu5zmrABe4ztOQEABn1A1h1gewjsYq7tdz9Os5jqLovft7+/WCyQcANKh4TZCacZzM+oC5DO5yNvTb+RL9uR/992WRXfsmuxEAnFGrPnxGgdqF32IkHwDOqJvGFZ4Aa2rYZiW2n+QDgCYWrwlSM46TWR9QRCl37kk+AJxRqz58RoFaG13VU/IB4Ix6Y9ilHWBjfPmP5AOATSxeE6RmHCezPqBEcy30IvkAcEat+vAZBZoq+34/+7AD4Ixa9eEzCqyDsdHfzpfoz/3B33HcOvDeAOCMWvXhMwoAAM6oa81qLgAAAKoPAAAA1QcAAIDqAwAAQPUBAACg+gAAAFB9AAAAqg8AAADVBwAAgOoDAABA9QEAAKD6AAAAUH0AAACoPgAAANUHAACA6gMAAED1AQAAoPoAAABQfQAAAKg+AAAAVB8AAIDqAwAAQPUBAACg+gAAAFB9AAAAqD4AAABUHwAAAKoPAABA9QEAAKD6AAAAUH0AAACoPgAAAFQfAAAAqg8AAED1AQAAoPoAAABQfQAAAKg+AAAAVB8AAACqDwAAANUHAACg+gAAAFB9AAAAqD4AAABUHwAAAKoPAAAA1QcAAIDqAwAAUH0AAACoPgAAAFQfAAAAqg8AAADVBwAAgOoDAABA9QEAAKg+AAAAVB8AAACqDwAAANUHAACA6gMAAED1AQAAoPoAAABUHwAAAKoPAAAA1QcAAIDqAwAAQPUBAACg+gAAAFQfAAAAqg8AAADVBwAAgOoDAABA9QEAAKD6AAAAUH0AAACqDwAAANUHAACA6gMAAED1AQAAUK0db0FTbG1teRMAAIC5U+Lz89O7AAAAsK5c4QkAAKD6AAAAUH0AAACoPgAAAFQfAAAAqg8AAADVBwAAoPoAAABQfQAAAKg+AAAAVB8AAACqDwAAANUHAACA6gMAAFB9AAAAqD4AAABUHwAAAKoPAAAA1QcAAIDqAwAAQPUBAACoPgAAAFQfAAAAqg8AAADVBwAAgOoDAABA9QEAAKD6AAAAVB8AAACqDwAAANUHAACA6gMAAED1AQAAoPoAAABUHwAAAKoPAAAA1QcAAIDqAwAAYFl2vAWNsLW15U0AAIAiPj8/VR8+owAAsJ42eY7iCk8AAADVBwAAgOoDAABA9QEAAKD6AAAAUH0AAACoPgAAANUHAACA6gMAAED1AQAAoPoAAABQfQAAAKg+AAAAVB8AAIDqAwAAQPUBAACg+gAAAFB9AAAAqD4AAABUHwAAAKoPAABA9QEAAKD6AAAAUH0AAACoPgAAAFQfAAAAqg8AAADVBwAAoPoAAABQfQAAAKg+AAAAVB8AAACqDwAAANUHAACg+gAAAFB9AAAAqD4AAABUHwAAAKoPAAAA1QcAAIDqAwAAUH0AAACoPgAAAFQfAAAAqg8AAADVBwAAgOoDAABA9QEAAKg+AAAAVB8AAACqDwAAANUHAACA6gMAAED1AQAAoPoAAABUHwAAAKoPAAAA1QcAAIDqAwAAQPUBAACg+gAAAFB9AAAAqg8AAADVBwAAgOoDAABA9QEAAKD6AAAAUH0AAACqDwAAANUHAACA6gMAAED1AQAAoPoAAABQfQAAAKg+AAAA1QcAAIDqAwAAQPUBAACg+gAAAFB9AAAAqD4AAABUHwAAgOoDAABA9QEAAKD6AAAAUH0AAACoPgAAAFQfAAAAqg8AAED1AQAAoPoAAABQfQAAAKg+AAAAVB8AAACqDwAAANUHAACg+gAAAFB9AAAAqD4AAABUHwAAAKoPAAAA1QcAAKD6AAAAUH0AAACoPgAAAFQfAAAAqg8AAADVBwAAgOoDAADYRDvegqbY2tryJgAAAHOnxOfnp3cBAABgXbnCEwAAQPUBAACg+gAAAFB9AAAAqD4AAABUHwAAAKoPAABA9QEAAKD6AAAAUH0AAACoPgAAAFQfAAAAqg8AAADVBwAAoPoAAABQfQAAAKg+AAAAVB8AAACqDwAAANUHAACA6gMAAFB9AAAAqD4AAABUHwAAAKoPAAAA1QcAAIDqAwAAQPUBAACoPgAAAFQfAAAAqg8AAADVBwAAgOoDAABA9QEAAKg+AAAAVB8AAACqDwAAANUHAACA6gMAAED1AQAAoPoAAABUHwAAAKoPAAAA1QcAAIDqAwAAQPUBAACg+gAAAFB9AAAAqg8AAADVBwAAgOoDAABA9QEAAKD6AAAAUH0AAACoPgAAANUHAACA6gMAAED1AQAAoPoAAABQfQAAAKg+AAAAVB8AAIDqAwAAQPUBAACg+gAAAFB9AAAAqD4AAABUHwAAgOoDAABA9QEAAKD6AAAAUH0AAACoPgAAAFQfAAAAqg8AAED1AQAAoPoAAABQfQAAAKg+AAAAVB8AAACqDwAAANUHAACg+gAAAFB9AAAAqD4AAABUHwAAAKoPAAAA1QcAAIDqAwAAUH0AAACoPgAAAFQfAAAAqg8AAADVBwAAgOoDAABA9QEAAKg+AAAAVB8AAACqDwAAANUHAACA6gMAAED1AQAAqD4AAABUHwAAAKoPAAAA1QcAAIDqAwAAQPUBAACg+gAAAFQfAAAAqg8AAADVBwAAgOoDAABA9QEAAKD6AAAAUH0AAACqDwAAANUHAACA6gMAAED1AQAAoPoAAABQfQAAAKg+AAAA1QcAAIDqAwAAQPUBAACg+gAAAFB9AAAAqD4AAABUHwAAgOoDAABA9QEAAKD6AAAAUH0AAACoPgAAAFQfAACA6gMAAED1AQAAoPoAAABQfQAAAKg+AAAAVB8AAACqDwAAQPUBAACg+gAAAFB9AAAAqD4AAABUHwAAAKoPAAAA1QcAAKD6AAAAUH0AAACoPgAAAFQfAAAAqg8AAADVBwAAgOoDAABQfQAAAKg+AAAAVB8AAACqDwAAANUHAACA6gMAAFB9AAAAqD4AAABUHwAAAKoPAAAA1QcAAIDqAwAAQPUBAACoPgAAAFQfAAAAqg8AAADVBwAAgOoDAABA9QEAAKD6AAAAVB8AAACqDwAAANUHAACA6gMAAED1AQAAoPoAAABQfQAAAKoPAAAA1QcAAIDqAwAAQPUBAACg+gAAAFB9AAAAqD4AAADVBwAAgOoDAABA9QEAAKD6AAAAUH0AAACoPgAAANUHAACA6gMAAED1AQAAoPoAAABQfQAAAKg+AAAAVB8AAIDqAwAAQPUBAACg+gAAAFB9AAAAqD4AAABUHwAAAKoPAABA9QEAAKD6AAAAUH0AAACoPgAAAFQfAAAAqg8AAADVBwAAoPoAAABQfQAAAKg+AAAAVB8AAACqDwAAANUHAACA6gMAAFB9AAAAqD4AAABUHwAAAKoPAAAA1QcAAIDqAwAAUH0AAACoPgAAAFQfAAAAqg8AAADVBwAAgOoDAABA9QEAAKg+AAAAVB8AAACqDwAAANUHAACA6gMAAED1AQAAoPoAAABUHwAAAKoPAAAA1QcAAIDqAwAAQPUBAACg+gAAAFB9AAAAqg8AAADVBwAAgOoDAABg6ba2vAcArLPtzs5H8iuKPj8/h1/budv6+3Tk3wFgrf0PwZZKHheX0coAAAAASUVORK5CYII=)
5
Week10: 参数提取语句
Week11: 齐纳二极管仿真
Week12: PIN 二极管仿真
Week13: 三极管仿真
Week14: MOS 器件仿真
Week15: 其他器件仿真(如太阳能电池)
Week 16: 二次击穿特性仿真
Experiment Part
Week 1: Overview of the TCAD tools
Week2: Operation of Deckbuild and Tonyplot
Week3: Basic grammar rules for Silvaco TCAD tool
Week4: Mesh definition for device construction
Week5: Region and material definition for device construction
Week6: Doping, electrode and contact definition for device construction
Week7: model method and interface definition for characteristic simulation
Week8: Electrical characteristics solution
Week9: Diode and breakdown properties simulation
Week10: Extraction with the simulation tool
Week11: Zener Diode simulation
Week12: PIN diode simulation
Week13: BJT simulation
Week14: MOS simulation
Week15: Solar cell simulation
Week 16: second breakdown simulation
18.
教材及其它参考资料 Textbook and Supplementary Readings
教材 Textbook:
Physics of Semiconductor Devices, 7
th
Edition, S. M. Sze, Kwok K. Ng
半导体物理学(第 7 版)刘恩科
课程评估 ASSESSMENT