课程学习目标:到课程结束,学生能掌握以下内容:
MEMS
技术
微纳传感器原理
微纳传感器的概念、设计、制作及应用
大健康传感器
自主驾驶传感器
无线无源传感器
Course Learning Objectives: By the end of this class, students could master:
MEMS technology
Micro-nano sensor principle
Concept, design, fabrication and application of micro-nano sensors
Health sensors
Autonomous driving sensors
Wireless passive sensors