(Tentative, subject to change)
1. Introduction to MEMS and BioMEMS
2. Microfabrication techniques for MEMS
3. Microfabrication for BioMEMS
4. MEMS Actuators and Principles of Microfluidics
5. Surface Chemistry
6. Microfluidic devices
7. Chemical analysis systems
8. Seminar - TBD
9. Midterm
10. Implantable devices
11. Microsystems for DNA/Protein analysis
Minimally invasive diagnosis tools
12. Neural Interface
Microsystems for Cellular Studies
13. Applications of MEMS in Surgery
BioMEMS packaging
14. Nanotechnology in BioMEMS
15. Term project presentation I
16. Term project presentation II
17. Seminar - TBD
18. Final Exam