1
课程详述
COURSE SPECIFICATION
以下课程信息可能根据实际授课需要或在课程检讨之后产生变动。如对课程有任何疑问,请联
系授课教师。
The course information as follows may be subject to change, either during the session because of unforeseen
circumstances, or following review of the course at the end of the session. Queries about the course should be
directed to the course instructor.
1.
课程名称 Course Title
第三代半导体基础导论
Introduction of Wide Bandgap Semiconductors
2.
授课院系
Originating Department
电子与电气工程系
Department of Electrical and Electronic Engineering
3.
课程编号
Course Code
EE345
4.
课程学分 Credit Value
3
5.
课程类别
Course Type
专业选修课 Major Elective Courses
6.
授课学期
Semester
秋季
Fall
7.
授课语言
Teaching Language
中英双语
English & Chinese
8.
他授课教师)
Instructor(s), Affiliation&
Contact
For team teaching, please list
all instructors
刘召军 南方科技大学电子与电气工程系 助理教授
Zhaojun Liu, Assistant Professor, Department of Electrical and Electronic Engineering,
Southern University of Science and Technology
9.
/
方式
Tutor/TA(s), Contact
王艳 (助教)/电子系,13823288624
Wang Yan (TA)/ Department of Electrical and Electronic Engineering, 13823288624
10.
选课人数限额(不填)
Maximum Enrolment
Optional
50
2
授课方式
Delivery Method
习题/辅导/讨论
Tutorials
实验/实习
Lab/Practical
其它(请具体注明)
OtherPlease specify
总学时
Total
11.
学时数
Credit Hours
0
0
48
12.
先修课程、其它学习要求
Pre-requisites or Other
Academic Requirements
EE203 固态电子学或 EE204 半导体器件导论
EE203 Solid-state Electronics or EE204 Introduction to Semiconductor Devices
13.
后续课程、其它学习规划
Courses for which this course
is a pre-requisite
通过本课程的学习,学生可以比较全面的了解第三代半导体材料与器件在国家发展战略中
的重要性,并较为深刻的理解以碳化硅和氮化镓材料为代表的新型半导体照明与显示、电
力电子器件、激光器和探测器、可见光通讯等概念与相对应的器件工作原理。为其后续在
相关领域的学习和研究打下基础。
Through this course, students can have a comprehensive understanding of the
importance of third-generation semiconductor materials and devices in national
development strategies, and a deeper understanding of new semiconductor lighting and
display represented by silicon carbide and gallium nitride materials. Power electronics,
lasers and detectors, visible light communication and other concepts and corresponding
device operating principles. It lays the foundation for its subsequent study and research
in related fields.
14.
其它要求修读本课程的学系
Cross-listing Dept.
No
教学大纲及教学日历 SYLLABUS
15.
教学目标 Course Objectives
本课程要求学生熟练掌握第三代半导体材料和器件的基础知识,包括第三代半导体材料的基本概念及其战略意义,晶体结
构与原子排布,力学特性与热学特性,异质结的基本原理与特性;以碳化硅和氮化镓材料为代表的第三代半导体照明与显
示、电力电子器件、激光器和探测器、可见光通讯等概念与应用;本课程侧重于基本概念的掌握和重点应用技术的了解,
要求学生了解第三代半导体材料与器件的发展脉络,获取相关的基础理论与工程信息。使学生初步掌握分析、解决工程实
际问题的思路和方法,初步掌握第三代半导体的主要工艺技术及其对器件性能的影响。本课程的主要任务是为后续的相关
专业课打下牢固的基础,同时为学生以后从事微电子、材料、通讯等相关的教学科研或者工艺开发打下扎实的基础,为国
家增加战略性先进材料方面的人才储备。
The course will introduce the fundamentals of the third generation semiconductor material and devices, including their
applications and processing. Topics for the course include crystal structures, kinetic molecular theory and thermally
characteristics; electrical and thermal conductivity, heterojunction, energy band theory, and applications. SiC and GaN
based solid-state lighting and advance displays, power electronics, laser diodes, detectors, and visible light
communications. The students are required to learn the basics of above and the skills to use the knowledge for future
microelectronic, material, communication related research or teaching works.
16.
预达学习成果 Learning Outcomes
掌握第三代半导体材料与器件的基本概念,晶体结构,原子排布,缺陷以及晶体生长基础知识,霍尔效应,金属和半导体
材料的电导电阻等。特别是掌握与碳化硅和氮化镓相关的量子物理基础,包括量子化基础,固体能带理论,费米能级,二
维电子气结构,异质结,掺杂技术与原理,结型和场效应型高速电子迁移率晶体管基本结构。本课程要求学生掌握相关的
的基本概念和规律,对于基础理论,要求应用简单的模型定性说明,并能做简单的数学计算出来。学习过程中提高分析和
解决实际问题的能力,并重视理论和实践的机会。
After this course, the students will know the fundamental principles of the third generation semiconductor material and
devices. They will know the concept of crystal structures, atom special arrangement, defects and growth process, hall-
effects, resistivity and conductivity. They will also know the systematic knowledge of SiC and GaN based material and
devices, including quantum effects, energy band theory, femi level, 2DEG, heterojunction, doping, JFET and MOSFET.
The students will use the knowledge to solve technical problems in their future study and research.
3
17.
课程内容及教学日历 (如授课语言以英文为主,则课程内容介绍可以用英文;如团队教学或模块教学,教学日历须注明
主讲人)
Course Contents (in Parts/Chapters/Sections/Weeks. Please notify name of instructor for course section(s), if
this is a team teaching or module course.)
教师:刘召军
第一章 第三代半导体的基本概念与战略意义(4 学时)
1. 第三代半导体的定义及范围(1 学时);2. 碳化硅与氮化镓晶体结构与原子空间排布(1 学时);3. 费米能级与能带
结构(0.5 学时);4. 缺陷态与掺杂(0.5 学时);5. 第三代半导体的主要应用与战略意义(1 学时)。
第二章 第三代半导体的制备工艺与表征 6 学时)
1. 碳化硅与氮化镓的外延生长工艺 1 学时);2. 材料表征手段与分析技术(1 学时);3. P 型与 n 型半导体材料的制
备技术(1 学时);4. 霍尔效应(0.5 学时);5. 欧姆接触与肖特基接触(0.5 学时);6. 第三代半导体制备工艺模拟
与仿真(2 学时)。
第三章 第三代半导体电力电子器件(12 学时)
1. 碳化硅与氮化镓器件基础原理(1 学时);2. 结型 HEMT1 学时);3. MOS-HEMT2 学时);4. 直流特性测试与
参数提取(1 学时);5 高频特性测试与数据分析(2 学时);6. 高压特性(1 学时);7. 具体应用实例(2 学时);
8. HEMT 器件模型参数提取(2 学时)。
第四章 第三代半导体发光与显示器件 14 学时)
1. LED 与半导体激光器原理与结构(3 学时);2. 半导体照明技术(2 学时);3. 第三代半导体新型显示技术(2
时);4. 光电测试与表征手段(1 学时);5. 具体应用实例与模拟仿真(2 学时);6.器件表征手段与模型提取(1
时);7. 封装技术与热稳定性(1 学时)。
第五章 第三代半导体光电转换器件(6 学时)
1. 氮化镓传感器原理与器件结构(2 学时);2. 光伏器件原理与结构(2 学时);3. 氮化镓传感器与光伏器件测试手段
2 学时);4. 具体应用实例与模拟仿真(2 学时)
第六章 未来技术及展望(6 学时)
1. 第三代半导体技术的发展趋势(1 学时);2. 异质光电集成技术(1 学时);3. 同质光电集成技术(1 学时);4.
通讯/光互联技术(1 学时);5. 未来技术(1 学时);6. 光通讯应用实例展示(1 学时)
Instructor: Zhaojun Liu, Assistant Professor, Department of Electrical and Electronic Engineering, SUSTech.
Chapter 1. Concepts of wide band-gap semiconductors and the key role to government strategy
1. Definition of wide band-gap semiconductors; 2. Crystal structure and atom spatial arrangement of SiC and GaN; 3.
Femi level and energy band theory; 4. Defects and doing; 5. Key applications.
Chapter 2: Growth, fabrication, and characterization methods of wide band-gap semiconductors
1. Epi-growth of SiC and GaN; 2. Characterization and analysis technique of materials; 3. p-type and n-type
semiconductors; 4. Hall Effect; 5. Ohmic contact and schottky contact; 6. Calculation and simulation of SiC and GaN
materials.
Chapter 3. Working principle and applications of SiC and GaN power electronics
1. Fundamentals of SiC and GaN devices; 2. JFETs; 3. MOSHEMTs; 4. DC characteristics and parameters extraction;
5. RF characteristics and data analysis; 6 Break down; 7. Key applications; 8. GaN HEMT characterization and
4
model extraction.
Chapter 4. Principle and applications of SiC and GaN based optoelectronic devices
1. Semiconductor laser diodes; 2. Solid-state lighting technologies; 3. SiC and GaN based display technologies; 4.
Detectors; 5. Characterization methods of optoelectronic devices; 6. Key applications; 7. Characterization and
model of Micro-LED photoelectric devices.
Chapter 5. Wide band-gap photodetectors and PV devices
1. Principles of GaN-based photodetectors; 2. Principles of wide bandgap PV devices; 4. Characterizations; 5.
Applications and simulations.
Chapter 6. Future technologies of wide band-gap semiconductors
1. Summary of the technology trends; 2. Heterogeneous integration technologies of optoelectronics; 3. Homogeneous
integration of optoelectronics; 4. Visible light communication/interconnection technologies; 5. Forecast of future
technologies. 6. Demonstration of visible light communication of the wide band-gap semiconductor devices.
18.
教材及其它参考资料 Textbook and Supplementary Readings
自编教材
Self-editing teaching material
课程评估 ASSESSMENT
19.
评估形式
Type of
Assessment
评估时间
Time
占考试总成绩百分比
% of final
score
违纪处罚
Penalty
备注
Notes
出勤 Attendance
6
课堂表现
Class
Performance
6
小测验
Quiz
26
课程项目 Projects
平时作业
Assignments
12
期中考试
Mid-Term Test
期末考试
Final Exam
30
期末报告
Final
Presentation
20
5
其它(可根据需
改写以上评估方
式)
Others (The
above may be
modified as
necessary)
20.
记分方式 GRADING SYSTEM
A. 十三级等级制 Letter Grading
B. 二级记分制(通/不通过) Pass/Fail Grading
课程审批 REVIEW AND APPROVAL
21.
本课程设置已经过以下责任人/员会审议通过
This Course has been approved by the following person or committee of authority